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ECE 538 - Integrated Circuits Technology and Fabrication at North Carolina State University

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Processes used in fabrication of modern integrated circuits. Process steps for crystal growth, oxidation, diffusion, ion implantation, lithography, chemical vapor deposition, etching, metallization, layout and packaging. Process integration for MOS and biopolar processes. Characterization techniques, simulation, yield and reliability.

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ECE 538 - Integrated Circuits Technology and Fabrication
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